Within the EU funded project SiTaSol AIXTRON SE and AIXTROM Limited investigate and develop low cost epitaxy processes and reactor concepts. In focus of research are investigation and developments om MOCVD reactors to improve growth rate of Ga(In)As(P) and production cost.
Low Cost III-V Epitaxy Processes and Reactor Concepts - Update August, 2018
- Thorsten Anders, AIXTRON SE
- August, 2018